Study of the silicon carbide modification by radiation erosion methods in the context of the atmosphere phase composition: a review
https://doi.org/10.34680/2076-8052.2024.1(135).76-94
Abstract
As part of the study, a review of existing technologies for modifying silicon carbide for subsequent use when creating devices in radio engineering and telecommunications equipment was carried out. The main advantages of silicon carbide due to its properties, new methods of its processing taking the influence of the atmosphere phase composition into account are given, a physical and mathematical model of laser dimensional modification of silicon carbide crystals is given, a new technique for carrying out the regeneration process of erosion traces of radiation nature in silicon carbide crystals in a liquid medium is given, and also practical recommendations have been developed for the implementation of the method of laser dimensional modification of carbide crystals, distinguished by structural and technical solutions within the framework of automated technology for creating a mesa-planar design with elements of limiting the conductive connections of microsystems, based on the radiation erosion implementation in a gas and liquid environment, as well as a controlled regeneration process of erosion traces.
About the Authors
D. A. Evstigneev
Yaroslav-the-Wise Novgorod State University
Russian Federation
Russian Federation
Veliky Novgorod.
N. P. Kornyshev
Yaroslav-the-Wise Novgorod State University
Russian Federation
Russian Federation
Veliky Novgorod.
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Review
For citations:
Evstigneev D.A., Kornyshev N.P. Study of the silicon carbide modification by radiation erosion methods in the context of the atmosphere phase composition: a review. Title in english. 2024;(1(135)):76-94. (In Russ.) https://doi.org/10.34680/2076-8052.2024.1(135).76-94
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